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R&D

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R&D

 Sensor Measurement + Optical Inspection & Measurement + F/A Solution

Sensor Measurement

Sensing micro displacement in special environment conditions such as semiconductor vaccum equipment, high temperature, pressure, and gas

Optical Inspection & Measurement

  • Quality test using high speed line scanning
  • Plasma spectrum analysis
  • Measuring electron density and temperature of plasma

Optical Inspection & Measurement

  • Quality test using high speed line scanning
  • Plasma spectrum analysis
  • Measuring electron density and temperature of plasma

Laser Application Technology

  • Micro displacement measuring technology using interference of laser
  • Long distance measuring technology using directivity of laser
  • 3D scanner using laser

F/A Solutions

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