• HOME
  • CONTACT
  • Korean
  • English
  • Chinese
  • HOME
  • CONTACT
  • Korean
  • English
  • Chinese

Products

Measurment & Sensor Professional Group

home > Products > Flatness measurement tool > MLL

Products

Flatness measurement tool

MLL Series (Light source generator + detector configuration)

Product features

Wireless type
Real-time flatness measurement system
Auto zero calibration
PDA data collection

Product application area

Flatness measurement for semiconductor CVD equipment area
Equipment leveling alignment area
Flatness management for car parts

Product technical specification

Light source head move method : Automatic rotation
Detector Linearized accuracy : ±3.5um
Auto saving measured value with PDA