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Products

Measurment & Sensor Professional Group

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New Products(developing)

NEW PRODUCTS

Products

Nano thin film
Lidar

Nano thin film thickness measurement

Product features

Nano pattern shape
Thin film thickness measurement
Refractive index
Surface roughness

Product technical specification

Range of wavelength : RGB/whith light(optional)
Reproducibility : < 0.1nm
Measurement method : line scan
Line size : 200mm(selectable)
Line resolution > 1000
Stage size : optional
Range of measurement : 200um X 200um