Measurment & Sensor Professional Group
> Application > MCT Series
Susceptor to showerhead gaps must be checked and/or adjusted each time a process chamber is serviced to obtain the highest film uniformity. Legacy susceptor leveling methods which use dial indicators do not capture chamber deflections that result from evacuation, because they can only be used while the chamber is open and assume that the showerhead is parallel to the top of the chamber. MCT-Series uses touchable distance sensing and wireless communication to display gap information on a personal computer external to a closed and evacuated chamber
Legacy Leveling tool
Msotek MCT-4000 gapping system
| Model name/ specification | MCT-1000 | MCT-2000LT | MCT-2000HT | MCT-4000 |
|---|---|---|---|---|
| Working temperature | below 85℃ | below 85℃ | below 125℃ | below 85℃ |
| Measuring range | 780 ~ 980mils | 780 ~ 980mils | 780 ~ 980mils | 550 ~ 750mils |
| wire/wireless | wire | wireless | wireless | wireless |
| Number of Channels | General 5/5~9 | General 5, 9 / 5~25 | General 5, 9 / 5~25 | 3 |
| Data Display | HMI | HMI | HMI | HMI / Computer |
| Application field | CVD Chamber Big susceptor | CVD Chamber Bigger susceptor | CVD Chamber Bigger susceptor | CVD Chamber wafer size susceptor |
#503, Migun Techno-world2 B/D, 187 Techno-2-lo Yuseong-gu, Daejeon 305-500 Korea
Tel : +82-42-931-0380 / Fax : +82-42-931-0390 / E-mail : sales_gp@msotek.com
COPYRIGHT(C)2018 MSOTEK. ALL RIGHTS RESERVED
(34025) #503, Techno2-ro 187, Yuseong-gu, Daejeon
Tel : +82-42-931-0380 / Fax : +8242-931-0390 / E-mail : sales_gp@msotek.com
COPYRIGHT(C)2018 MSOTEK. ALL RIGHTS RESERVED