Gap&leveling spacing tool
MCT-4000 Series (3 Channel)
Product features
Optimized solution for CVD equipment의 Leveling work
Minimize the effect from external noise
Simple configuration/ high precision / Low Noise features
Over loading auto block function
Wireless communication interface applied
Provide convenient user interface by using HMI
Product application area
semiconductor CVD equipment
The equipment to measure Gap & leveling in the chamber
Suitable to the purpose of wireless
Product technical specification
Power : AC100V ~ 240V 50/60Hz 1.8A
Workable temperature : Within 85℃
Measuring range : 550 ~ 750mils
Precision : ±2um
Sensor Controller(Embedded battery): 200mm, 300mm, 450mm